SM5112
2003
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ sales@ si-micro.com ♦ www.si-micro.com
Cross-section of SM5112
Back port hole is 0.8 mm. Silicon is 0.4
mm; top and bottom glass is 0.5 mm
CHARACTERISTICS FOR SM5112 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Typ
Max
Units
Notes
Excitation Voltage
0
5
10
V
1
Excitation Current
0
1.5
3
mA
Span (FS Range)
15 psi
30 psi
60 psi
150 psi
300 psi
75
85
85
100
100
125
125
125
145
145
150
150
150
195
195
mV
mV
mV
mV
mV
2
Offset
-50
0
50
mV
TC Span
-24
-19
-15.5
%FS/100
oC
3
TC Offset
-15
2
+15
%FS/100
oC
TC Resistance
17
26
31
%/100
oC
Linearity
-0.3
0.3
%FS
4
Bridge Impedance
4.0
5.0
6.0
kohm
Proof Pressure
3X
Rated FS
Burst Pressure
5X
Rated FS
Operating Temperature
-40
125
oC
Storage Temperature
-55
150
oC
Notes:
1.
Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to bottom side of die when bridge is driven with positive voltage.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line.
Top view of SM5112 die
(2 mm square as sawn)
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
Pin
Function
1
Subs
2
N/C
3
Vext+
4
Sig+
5
Gnd
6
Sig-
7
N/C
Pin-out from Left to
Right in accompanying
figure.
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Pressure Ranges
PSI
5112
15
015
30
030
60
060
150
150
300
300
Custom ranges available in high volumes
ORDERING INFORMATION:
Rev 1.1 10_04
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