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ADXL322 Folha de dados(PDF) 11 Page - Analog Devices |
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ADXL322 Folha de dados(HTML) 11 Page - Analog Devices |
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11 / 16 page  ADXL322 Rev. 0 | Page 11 of 16 THEORY OF OPERATION The ADXL322 is a complete acceleration measurement system on a single monolithic IC. The ADXL322 has a measurement range of ±2 g. It contains a polysilicon surface micromachined sensor and signal conditioning circuitry to implement an open- loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer measures static acceleration forces, such as gravity, which allows it to be used as a tilt sensor. The sensor is a polysilicon surface-micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of inde- pendent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the beam and unbalances the differential capacitor, resulting in an output square wave whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to rectify the signal and determine the direction of the acceleration. The demodulator’s output is amplified and brought off- chip through a 32 kΩ resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. PERFORMANCE Rather than using additional temperature compensation circuitry, innovative design techniques were used to ensure built-in high performance. As a result, there is neither quanti- zation error nor nonmonotonic behavior, and temperature hysteresis is very low (typically less than 5 mg over the −20°C to +70°C temperature range). Figure 11 shows the zero g output performance of eight parts (X- and Y-axis) over a −20°C to +70°C temperature range. Figure 14 demonstrates the typical sensitivity shift over tem- perature for supply voltages of 3 V. This is typically better than ±1% over the −20°C to +70°C temperature range. |
Nº de peça semelhante - ADXL322_15 |
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Descrição semelhante - ADXL322_15 |
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